DocumentCode
2517622
Title
Design and fabrication of a MEMS 1-D optical scanner using self-assembled vertical combs and scan-angle magnifying mechanism
Author
Yoda, M. ; Isamoto, K. ; Chong, C. ; Ito, H. ; Murata, A. ; Toshiyoshi, H.
Author_Institution
Seiko Epson Corp., Nagano
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
19
Lastpage
20
Abstract
We report a novel one-axis MEMS optical scanner with a scan-angle magnifying mechanism. Small actuator-motion was amplified through the two-mass-two-spring mechanism, and a large mirror angle was obtained
Keywords
electrostatic actuators; micro-optics; mirrors; optical design techniques; optical scanners; MEMS 1-D optical scanner design; actuator-motion; angular magnifying mechanism; scan-angle magnifying mechanism; self-assembled vertical comb; two-mass-two-spring mechanism mirror angle; Actuators; Indium tin oxide; Micromechanical devices; Mirrors; Optical design; Optical device fabrication; Resonance; Resonant frequency; Stimulated emission; Two dimensional displays;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540055
Filename
1540055
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