Development of two dimensional scanner-on-scanner for confocal laser scanning microscope "LEXT" series

Author

Miyajima, Hiroshi ; Nishio, Masahiro ; Kamiya, Yoshitaka ; Ogata, Masanori ; Sakai, Yohei ; Inoue, Hiroshi

Author_Institution

Olympus Corp., Tokyo

fYear

2005

fDate

1-4 Aug. 2005

Firstpage

23

Lastpage

24

Abstract

A two dimensional (2-D) Scanner-on-scanner (SOS) has been developed for commercial confocal laser scanning microscope (LSM) "LEXT\´ series. The SOS consists of a newly developed electromagnetic MEMS scanner mounted on a commercially available galvanometric scanner, being inclined at 45deg. The SOS realizes much smaller distortion in the 2-D scanning pattern than that obtained by gimbaled type MEMS 2-D scanner. Key issue is miniaturizing the MEMS scanner so that it can be mounted onto the galvanometric scanner. It was realized by using a coil for both driving and sensing so that sensing output was increased, and thus size reduction of permanent magnets have become possible, leading to the scanner volume of approximately 9.3 % of the one previously developed for a LSM, Olympus OLS1200

Keywords

micro-optics; micromechanical devices; optical microscopy; optical scanners; permanent magnets; 2-D scanning pattern; LEXT series; confocal laser scanning microscope; electromagnetic MEMS scanner; galvanometric scanner; gimbaled type MEMS 2-D scanner; permanent magnet; two dimensional scanner-on-scanner; Coils; Laser noise; Magnetic fields; Magnets; Micromechanical devices; Microscopy; Mirrors; Optical distortion; Optical sensors; Telephony;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Conference_Location

Oulu

Print_ISBN

0-7803-9278-7

Type

conf

DOI

10.1109/OMEMS.2005.1540057

Filename

1540057