Title :
A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion
Author :
Todd, Shane T. ; Jain, Ankur ; Qu, Hongwei ; Xie, Huikai
Author_Institution :
Dept. of Electr. & Comput. Eng., Florida Univ., Gainesville, FL
Abstract :
A new electrothermal micromirror with large piston and tilt motions was proposed and fabricated. Large initial tilt angles and optical path shifting of previously fabricated thermal micro mirrors were eliminated by employing inverted-series-connected (ISC) bimorph actuators
Keywords :
microactuators; micromirrors; optical fabrication; pistons; 3-D electrothermal micromirror; inverted-series-connected electrothermal bimorph actuator; micromirror fabrication; optical path shifting; piston; tilt motion; Biomedical optical imaging; Electrothermal effects; Micromirrors; Mirrors; Optical design; Piezoelectric actuators; Pistons; Structural beams; Temperature; Voltage;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540059
