Title :
Piezoelectric thin-film unimorph actuator for optical fiber alignment in photonic modules
Author :
Tuominen, J. ; Lappalainen, J. ; Hiltunen, J. ; Ollila, J. ; Lantto, V.
Author_Institution :
VTT Electron., Optoelectron., Oulu
Abstract :
Feasibility of a piezoelectric PZT unimorph thin-film actuator on silicon substrates for optical fiber alignment in hybrid photonic modules was investigated. Displacements up to 57 mum were achieved enabling adjustability of optical coupling efficiency
Keywords :
micro-optics; microactuators; optical fibre fabrication; piezoelectric actuators; piezoelectric thin films; silicon; thin film devices; PZT; PbZrO3TiO3; Si; hybrid photonic module; optical coupling efficiency; optical fiber alignment; piezoelectric PZT unimorph thin-film actuator; silicon substrate; Diode lasers; Optical fibers; Optical films; Optical materials; Piezoelectric actuators; Piezoelectric films; Piezoelectric materials; Semiconductor thin films; Silicon; Substrates;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540064
