Title :
Pull-in voltage measurements of torsional micromirror arrays for uniformity characterization
Author :
Jang, Yun-Ho ; Lee, Kook-Nyung ; Yoo, Byung-Wook ; Kim, Yong-Kweon
Author_Institution :
Image Dev. Team, Samsung Electron.
Abstract :
In this paper, we describe pull-in voltage measurement technique and results for the uniformity characterization of torsional micromirror arrays (MMAs). A simple measurement scheme using two illuminators and image processing was implemented. The MMAs were fabricated using two kinds of substrate; silicon on glass (SiOG) and silicon on insulator (SOI) wafers. Pull-in voltage distributions are presented, and the differences of two substrates on pull-in voltage distributions are compared
Keywords :
glass; image processing; micromirrors; optical arrays; optical fabrication; silicon-on-insulator; voltage measurement; illuminator; image processing; pull-in voltage distribution; pull-in voltage measurement technique; silicon on glass; silicon on insulator wafers; torsional micromirror arrays fabrication; uniformity characterization; Crystallization; Electrodes; Fabrication; Glass; Micromirrors; Mirrors; Silicon on insulator technology; Springs; Time measurement; Voltage measurement;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540065
