• DocumentCode
    2517854
  • Title

    A 2d optical lens scanner with small footprint actuators

  • Author

    Takahashi, Koichi ; Kwon, H.N. ; Saruta, K. ; Mita, M. ; Lee, J.H. ; Fujita, H. ; Toshiyoshi, H.

  • Author_Institution
    Inst. of Ind. Sci., Tokyo Univ.
  • fYear
    2005
  • fDate
    1-4 Aug. 2005
  • Firstpage
    43
  • Lastpage
    44
  • Abstract
    This paper proposes a new optical and mechanical design for an optical crossconnect using MEMS 2D lens scanner. Optical simulation justified the use of telescope optics for low loss and compact OXC design. The suspensions and the electrostatic mechanism were designed in separate SOI layers to compress the device footprint and to accommodate more optical channels
  • Keywords
    electrostatic actuators; lenses; micromechanical devices; optical design techniques; optical fibre communication; optical interconnections; optical scanners; silicon-on-insulator; 2D optical lens scanner; MEMS; SOI layers; electrostatic mechanism; mechanical design; optical channels; optical crossconnect; optical simulation; small footprint actuators; suspension; telescope optics; Actuators; Aerospace industry; Electrostatics; Insertion loss; Lenses; Optical design; Optical losses; Stimulated emission; Suspensions; Telescopes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
  • Conference_Location
    Oulu
  • Print_ISBN
    0-7803-9278-7
  • Type

    conf

  • DOI
    10.1109/OMEMS.2005.1540067
  • Filename
    1540067
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2517854