DocumentCode
2517870
Title
A new approach for focusing deformable mirrors fabricated in polymer technology
Author
Greger, W. ; Arnold, D. ; Jurischka, R. ; Schoth, A. ; Müller, C. ; Wilde, J. ; Reinecke, H.
Author_Institution
IMTEK, Freiburg Univ.
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
45
Lastpage
46
Abstract
Nowadays, adaptive optics are already being used in a broad range of applications. The growing market of applications demands for low-cost adaptive optics with high optical quality. Adaptive optics like deformable mirrors, fabricated using micro structure technologies, currently cost about 60 USD. In this work, a circular adaptive mirror device for laser focussing was developed and fabricated in polymer materials. The focal length can be varied within the range from 0.1 to 1 m. Besides the cost-efficient fabrication of the mirror device this concept also features only one actuator for focussing. The driving voltage of the actuator lies in the range of 0 to 12 V, depending on the focal length of the deformable mirror
Keywords
actuators; adaptive optics; laser materials processing; mirrors; optical fabrication; optical focusing; optical materials; optical polymers; 0 to 12 V; 0.1 to 1 m; actuator; adaptive optics; circular adaptive mirror device; cost-efficient fabrication; deformable mirrors; driving voltage; focussing; laser focussing; market; microstructure technologies; optical quality; polymer materials; Adaptive optics; Costs; Embossing; Fabrication; Laboratories; Mirrors; Piezoelectric actuators; Polymers; Tensile stress; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540068
Filename
1540068
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