Title :
2 DOF optical microscanner with large deflection angles
Author :
Brugger, D. ; Kohl, M. ; Krevet, B. ; Winzek, B. ; Schmitz, S.
Author_Institution :
Forschungszentrum Karlsruhe GmbH
Abstract :
This paper reports on a novel microscanner with two degrees-of-freedom (DOF) fabricated from a shape memory alloy (SMA) thin film composite consisting of a three-layer system of Ti(Ni,Cu)/Mo/Fc(Cr,Ni). This three-layer system creates concave and convex curvatures upon heating and cooling, respectively, due to a strong change of bimorph stress mainly induced by a martensitic transformation. The resulting coupled thermal, mechanical and optical performance characteristics of Ti(Ni,Cu) thin films are deposited by DC-magnetron sputtering onto unheated Mo substrates, which exhibit a lower thermal expansion coefficient compared to TiNi-based alloys
Keywords :
martensitic transformations; optical fabrication; optical scanners; shape memory effects; sputtering; thermal expansion; DC-magnetron sputtering; bimorph stress; degrees-of-freedom; martensitic transformation; microscanner; optical fabrication; shape memory alloy; thermal expansion coefficient; thin film composites; thin film deposition; three-layer system; Cooling; Heating; Optical coupling; Optical films; Shape memory alloys; Sputtering; Substrates; Thermal expansion; Thermal stresses; Transistors;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540069
