2 DOF optical microscanner with large deflection angles

Author

Brugger, D. ; Kohl, M. ; Krevet, B. ; Winzek, B. ; Schmitz, S.

Author_Institution

Forschungszentrum Karlsruhe GmbH

fYear

2005

fDate

1-4 Aug. 2005

Firstpage

47

Lastpage

48

Abstract

This paper reports on a novel microscanner with two degrees-of-freedom (DOF) fabricated from a shape memory alloy (SMA) thin film composite consisting of a three-layer system of Ti(Ni,Cu)/Mo/Fc(Cr,Ni). This three-layer system creates concave and convex curvatures upon heating and cooling, respectively, due to a strong change of bimorph stress mainly induced by a martensitic transformation. The resulting coupled thermal, mechanical and optical performance characteristics of Ti(Ni,Cu) thin films are deposited by DC-magnetron sputtering onto unheated Mo substrates, which exhibit a lower thermal expansion coefficient compared to TiNi-based alloys

Keywords

martensitic transformations; optical fabrication; optical scanners; shape memory effects; sputtering; thermal expansion; DC-magnetron sputtering; bimorph stress; degrees-of-freedom; martensitic transformation; microscanner; optical fabrication; shape memory alloy; thermal expansion coefficient; thin film composites; thin film deposition; three-layer system; Cooling; Heating; Optical coupling; Optical films; Shape memory alloys; Sputtering; Substrates; Thermal expansion; Thermal stresses; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Conference_Location

Oulu

Print_ISBN

0-7803-9278-7

Type

conf

DOI

10.1109/OMEMS.2005.1540069

Filename

1540069