DocumentCode
2517971
Title
High fill-factor micromirror array and its fabrication process
Author
Jeon, Jin-Wan ; Dae-Hyun Kim ; Yoon, Jun-Bo ; Lim, Koeng Su
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Daejeon
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
53
Lastpage
54
Abstract
The micromirror array with high fill-factor of 91% is fabricated. For high fill-factor, the posts supporting the mirror plate are filled up with copper by the uniform electroplating process
Keywords
copper; electroplating; micromachining; micromirrors; optical fabrication; copper; electroplating process; fabrication; fill-factor micromirror array; mirror plate; surface micromachining; Computer science; Copper; Displays; Fabrication; Micromachining; Micromirrors; Mirrors; Optical arrays; Resists; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540072
Filename
1540072
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