Thermally actuated micro scanner for barcode reader applications

Author

Khechana, Faouzi ; van Lintel, Harald ; Massieu, J.L. ; Ackley, Sprague ; Renaud, Philipe

Author_Institution

Microsyst. Lab., Ecole Polytech. Fed. de Lausanne

fYear

2005

fDate

1-4 Aug. 2005

Firstpage

57

Lastpage

58

Abstract

This paper presents a low-cost 1D thermally actuated silicon micro scanner developed for our industrial partner. It was designed and optimised for mass production. With a really simple and standard fabrication process we obtained a high yield (> 95%) and good reproducibility of the scanner characteristics: low resonance frequency, good shock resistance, low power consumption, easy control, large mechanical sweep angle and a flat reflective surface

Keywords

bar codes; electrostatic actuators; mark scanning equipment; mass production; optical fabrication; optical scanners; silicon; barcode reader; easy control; fabrication; flat reflective surface; large mechanical sweep angle; mass production; micro scanner; power consumption; resonance frequency; shock resistance; silicon; thermal actuating; Design optimization; Electric shock; Energy consumption; Fabrication; Mass production; Reproducibility of results; Resonance; Resonant frequency; Silicon; Surface resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Conference_Location

Oulu

Print_ISBN

0-7803-9278-7

Type

conf

DOI

10.1109/OMEMS.2005.1540074

Filename

1540074