Title :
A physically based model for dielectric charging in an integrated optical mems wavelength selective switch
Author :
Nielson, Geogory N. ; Barbastathis, George
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM
Abstract :
A physical parameter based model for dielectric charge accumulation is proposed and used to predict the displacement versus applied voltage and pull-in response of an electrostatic MEMS wavelength selective integrated optical switch
Keywords :
dielectric properties; electro-optical switches; electrostatic devices; finite element analysis; integrated optics; micro-optics; microswitches; optical communication equipment; FEA; dielectric charge accumulation; integrated optical MEMS wavelength selective switch; physical parameter based model; pull-in response; Dielectrics; Energy states; Integrated optics; Microelectromechanical devices; Micromechanical devices; Optical filters; Optical ring resonators; Optical switches; Predictive models; Voltage;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540081
