Title :
Microreplication in a silicon processing compatible polymer material
Author :
Melin, Jonas ; Hedsten, Karin ; Magnusson, Anders ; Karlén, David ; Rödjegård, Henrik ; Persson, Katrin ; Bengtsson, Jorgen ; Enoksson, Peter ; Nikolajeff, Fredrik
Author_Institution :
Dept. of Eng. Sci., Uppsala Univ.
Abstract :
We present a novel fabrication process for the integration of polymer micro-optical elements on silicon. The process relies on a reverse order protocol based on embossing in an amorphous fluorocarbon polymer, Cytoptrade
Keywords :
embossing; integrated optics; micro-optics; micromechanical devices; optical elements; optical fabrication; optical polymers; replica techniques; silicon; Cytop; amorphous fluorocarbon polymer; compatible polymer material; fabrication process; microreplication; polymer micro-optical element integration; reverse order protocol; silicon; silicon processing; Etching; Lenses; Nickel; Optical device fabrication; Optical polymers; Optical refraction; Optical surface waves; Optical variables control; Silicon; Vertical cavity surface emitting lasers;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540091
