Title :
Micro polarizing beam splitter for blue wavelength optical pickups application
Author :
Lee, Chi-Hung ; Tsai, Wang-Ling ; Yi Chiu ; Shieh, Han-Ping D.
Author_Institution :
Dept. of Photonics & Inst. of Electro-Opt. Eng., Nat. Chiao Tung Univ., Hsinchu
Abstract :
Micro polarizing beam splitters (micro PBS) are required in micro optical systems for sensing and signal processing when the polarization state is a concern. In this paper, silicon nitride thin films with low stress and low absorption at 405 nm wavelength were investigated. The reflectance and the transmittance of TM and TE modes of a pop-up micro-PBS composed of a silicon nitride thin film and a poly-silicon frame were examined. Two types of micro PBSs based on low stress silicon nitride were successfully demonstrated. The performance agreed well with calculation. Such devices can be applied for micro optical pickups in data storage systems
Keywords :
light polarisation; micro-optics; micromechanical devices; optical beam splitters; optical polarisers; optical storage; pick-ups; reflectivity; silicon compounds; thin films; 405 nm; SiN; TE modes; TM modes; blue wavelength optical pickups application; data storage systems; micro optical pickups; micro optical systems; micro polarizing beam splitter; optical performance; poly-silicon frame; pop-up micropolarizing beam splitters; reflectance; sensing; signal processing; silicon nitride thin films; transmittance; Absorption; Optical beam splitting; Optical films; Optical polarization; Optical sensors; Optical signal processing; Reflectivity; Semiconductor thin films; Silicon; Stress;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540092
