DocumentCode
2518353
Title
Mirror with two parallel rotation axes for external cavity laser
Author
Ishimori, M. ; Sasaki, Minoru ; Hane, Kazuhiro
Author_Institution
Dept. of Nanomech., Tohoku Univ., Sendai
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
93
Lastpage
94
Abstract
A mirror device for an external cavity diode laser is fabricated. To achieve a wide and continuous tuning range, mechanical linkage of two parallel rotation axes can rotate and translate the mirror, generating a virtual pivot point of the mirror motion. This mirror device is realized using a wafer-folding technique
Keywords
laser beams; laser cavity resonators; laser mirrors; laser tuning; microactuators; micromirrors; optical fabrication; optical rotation; semiconductor lasers; silicon-on-insulator; MEMS; SOI; Si-SiO2; comb drive actuator; external cavity diode laser fabrication; laser tuning; mechanical linkage; mirror device; mirror motion; mode hop free tuning; parallel rotation axes; tunable laser; virtual pivot point; wafer-folding technique; Actuators; Diode lasers; Distributed feedback devices; Laser feedback; Laser modes; Laser tuning; Micromechanical devices; Mirrors; Optical tuning; Tunable circuits and devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540093
Filename
1540093
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