Title :
Fabrication and test of square prism shaped dye micro laser based on photoresist molding process
Author :
Li, Yigui ; Sugiyama, Susumu
Author_Institution :
Micro Syst. Center, Ritsumeikan Univ., Shiga
Abstract :
A dielectric microcavity of dye doped polydimethylsiloxane (PDMS) is fabricated by SU-8 photoresist molding technique. The molding technique by fabricating a solid polymer dye microcavity laser is described in detail. The dye laser microcavity resonators properties are confirmed
Keywords :
dye lasers; laser beams; laser cavity resonators; micro-optics; microcavities; micromechanical resonators; moulding; optical polymers; photoresists; SU-8 photoresist molding process; dielectric microcavity; dye doped polydimethylsiloxane fabrication; dye laser microcavity resonators property; solid polymer dye microcavity laser fabrication; square prism shaped dye micro laser fabrication; square prism shaped dye micro laser testing; Dielectrics; Microcavities; Optical device fabrication; Optical pumping; Optical refraction; Optical resonators; Optical variables control; Resists; Ring lasers; Testing;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540098
