DocumentCode
2518563
Title
MEMS compatible micro-GRIN lenses for in plane beam manipulation
Author
Zickar, Michael ; Oudalov, Alexander ; Noell, Wilfried ; Marxer, Cornel ; De Rooij, Nico
Author_Institution
Neuchatel Univ.
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
111
Lastpage
112
Abstract
The design, simulation, fabrication and characterization of micro-GRIN lenses with a diameter of 125 mum is presented. GRIN rods having the same diameter as optical fibers can be passively aligned using U-grooves and microfabricated springs
Keywords
gradient index optics; microlenses; micromechanical devices; optical fabrication; optical fibres; springs (mechanical); 125 micron; MEMS compatible microGRIN lenses characterization; U-grooves; in plane beam manipulation; microGRIN lenses design; microGRIN lenses fabrication; microGRIN lenses simulation; microfabricated springs; optical fibers; Lenses; Micromechanical devices; Optical collimators; Optical design; Optical device fabrication; Optical devices; Optical fibers; Optical losses; Optical refraction; Springs;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540103
Filename
1540103
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