Design and fabrication of MEMS optical modulators integrated with PHC waveguides

Author

Higo, Akio ; Iwamoto, Satoshi ; Ishida, Makoto ; Arakawa, Yasuhiko ; Fujita, Hideaki ; Toshiyoshi, Hiroshi ; Gomyo, A. ; Tokushima, Masatoshi ; Yamada, Hiroyoshi

Author_Institution

Inst. for Ind. Sci., Tokyo Univ.

fYear

2005

fDate

1-4 Aug. 2005

Firstpage

113

Lastpage

114

Abstract

We report the design and fabrication process of MEMS actuators for optical attenuators integrated with two-dimensional photonic crystal waveguide. Fabrication process has been improved from our previous model such that the SOI PhC layer is not delaminated during the sacrificial release in HF. The device was successfully developed and optically tested to obtain 2 dB modulation contrast at an 86 V with -27 dB insertion loss

Keywords

electrostatic actuators; integrated optics; micro-optics; optical attenuators; optical design techniques; optical modulation; optical waveguides; photonic crystals; silicon-on-insulator; 27 dB; 86 V; HF; MEMS actuator fabrication process; MEMS optical modulator design; PhC waveguides; SOI PhC layer; Si-SiO₂; electrostatic actuators; optical attenuators; two-dimensional photonic crystal waveguide; Actuators; Integrated optics; Micromechanical devices; Optical attenuators; Optical design; Optical device fabrication; Optical modulation; Optical waveguides; Photonic crystals; Process design;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on

Conference_Location

Oulu

Print_ISBN

0-7803-9278-7

Type

conf

DOI

10.1109/OMEMS.2005.1540104

Filename

1540104