DocumentCode :
2518582
Title :
1x2 MEMS optical switch with sub 10 μs switching speed inside silicon gold coated planar hollow waveguides (PHW)
Author :
Guerre, Roland ; Fahrni, F. ; Renaud, Philippe
Author_Institution :
Microsyst. Lab., Lausanne
fYear :
2005
fDate :
1-4 Aug. 2005
Firstpage :
115
Lastpage :
116
Abstract :
We present a new approach for guided-wave optical switches based on square silicon planar hollow waveguides (PHW). A 1times2 MEMS optical switch is manufactured by inserting into the hollow planar waveguide a micromechanical cantilever beam switch at the junction of Y waveguides. The small dimension of hollow planar waveguides (20 mum wide and 20 mum deep) and of the beam (2 mum wide and 250 mum long) allow very fast switching time below 10 mus. The fabrication steps to manufacture the switch need only two masks level. Gold coating enhances reflectivity inside hollow core. Planar hollow waveguides have another great advantage in the fact that optical function such as switching can be fabricated in the same process step than the hollow waveguide. This enables the fabrication of monolithic optical functions
Keywords :
antireflection coatings; gold; micro-optics; microswitches; optical planar waveguides; optical switches; silicon; 10 mus; 2 micron; 20 micron; 250 micron; Au; MEMS optical switch; Si; Y waveguides; guided-wave optical switches; micromechanical cantilever beam switch; monolithic optical functions; silicon gold coated planar hollow waveguides; Gold; Hollow waveguides; Manufacturing; Micromechanical devices; Optical planar waveguides; Optical switches; Optical waveguides; Planar waveguides; Silicon; Waveguide junctions;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
Type :
conf
DOI :
10.1109/OMEMS.2005.1540105
Filename :
1540105
Link To Document :
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