DocumentCode :
2518623
Title :
Electrostatic micro-shutter array for infrared spectrograph
Author :
Takahashi, Takuya ; Mita, Makoto ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ.
fYear :
2005
fDate :
1-4 Aug. 2005
Firstpage :
119
Lastpage :
120
Abstract :
We report an electrostatic micro shutter array for astronomical telescopes for parallel processing infrared spectroscopy of multiple celestial objects using bulk-micromachining of silicon-on-insulator wafers. Successful operation of micro torsion shutter to a 90-degree-deflection has been demonstrated with applied voltages of up to 95 V DC
Keywords :
astronomical telescopes; electrostatic devices; infrared astronomy; infrared spectroscopy; micro-optics; micromachining; silicon-on-insulator; 95 V; Si-SiO2; astronomical telescopes; bulk-micromachining; electrostatic microshutter array; micro torsion shutter; multiple celestial objects; parallel processing infrared spectroscopy; silicon-on-insulator wafers; Bars; Electrostatics; Etching; Infrared spectra; Observatories; Optical arrays; Silicon on insulator technology; Spectroscopy; Telescopes; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
Type :
conf
DOI :
10.1109/OMEMS.2005.1540107
Filename :
1540107
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2518623
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