Title :
Imaging micro-spectrometer with adaptive space-variant dispersion
Author :
Zhou, W. ; Shield, E. ; Liu, W. ; Leger, J. ; Talghader, J.
Author_Institution :
Dept. of Electr. & Comput. Eng., Minnesota Univ., Minneapolis, MN
Abstract :
A space-variant variable-dispersion imaging micro-spectrometer is described. An array of MEMs mirrors is used to select different optical paths through the spectrometer, permitting dynamically adjustable grating dispersion on a pixel-by-pixel basis across the image. Diffraction-limited performance is achieved across the 500-1000 nm wavelength range; and spectral resolutions ranging from 5 to 20 nm
Keywords :
diffraction gratings; micromirrors; optical dispersion; spectrometers; 500 to 1000 nm; MEMs mirrors; adaptive space-variant dispersion; adjustable grating dispersion; imaging microspectrometer; optical paths; Gratings; Image resolution; Mirrors; Optical arrays; Optical imaging; Optical sensors; Pixel; Resists; Spectroscopy; Wavelength measurement;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540108
