• DocumentCode
    2518743
  • Title

    Solid-immersion micromirror with enhanced angular deflection for silicon-based planar lightwave circuits

  • Author

    Chi, Chao-Hsi ; Tsai, Jui-che ; Hah, Dooyoung ; Jeong, Ki- Hun ; Wu, Ming C.

  • Author_Institution
    Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA
  • fYear
    2005
  • fDate
    1-4 Aug. 2005
  • Firstpage
    131
  • Lastpage
    132
  • Abstract
    We report on a MEMS-based on-chip solid-immersion micromirror (SIM), which provides enhanced angular deflection and reduced diffraction loss. The SIM is driven by rotary comb-drive actuators. Maximum mechanical scan angle of 8 degree is achieved
  • Keywords
    micromirrors; optical planar waveguides; silicon; MEMS-based on-chip solid-immersion micromirror; Si; angular deflection; diffraction loss; mechanical scan angle; rotary comb-drive actuators; silicon-based planar lightwave circuits; Circuits; Micromechanical devices; Micromirrors; Mirrors; Optical diffraction; Optical losses; Optical refraction; Pneumatic actuators; Programmable control; Slabs;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
  • Conference_Location
    Oulu
  • Print_ISBN
    0-7803-9278-7
  • Type

    conf

  • DOI
    10.1109/OMEMS.2005.1540113
  • Filename
    1540113
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2518743