Characteristics of coupled microcircular lasers confined by insulator SiO2 and metal layer with an output waveguide

Author

Lin, Jian-Dong ; Huang, Yong-Zhen ; Yao, Qi-Feng ; Lv, Xiao-Meng ; Yang, Yue-De ; Xiao, Jin-Long ; Du, Yun

Author_Institution

State Key Lab. on Integrated Optoelectron., Chinese Acad. of Sci., Beijing, China

fYear

2010

fDate

3-6 Dec. 2010

Firstpage

1

Lastpage

3

Abstract

Coupled microcircular lasers with an output waveguide laterally confined by insulator SiO₂ and p-electrode metal are fabricated by conventional photolithography and inductively coupled-plasma etching technique. Mode characteristics are numerically investigated by FDTD technique.

Keywords

arsenic compounds; gallium compounds; gold; indium compounds; integrated optics; microcavities; microcavity lasers; optical fabrication; optical waveguides; photolithography; semiconductor lasers; silicon compounds; sputter etching; titanium; FDTD; GaInAsP-InP; Ti-Au-SiO₂; coupled microcircular lasers; inductively coupled-plasma etching; insulator layer; metal layer; microcircular resonators; mode characteristics; optical fabrication; output waveguide; p-electrode metal; photolithography; Finite difference methods; Laser modes; Metals; Optical waveguides; Semiconductor lasers; Time domain analysis; Waveguide lasers; coupled modes; microcircular lasers; whispering-gallery modes;

fLanguage

English

Publisher

ieee

Conference_Titel

Advances in Optoelectronics and Micro/Nano-Optics (AOM), 2010 OSA-IEEE-COS

Conference_Location

Guangzhou

Print_ISBN

978-1-4244-8393-8

Electronic_ISBN

978-1-4244-8392-1

Type

conf

DOI

10.1109/AOM.2010.5713544

Filename

5713544