Title :
High-speed optical nanofabrication by platinum oxide nano-explosion - all dry-fabrication
Author :
Kurihara, Kazuma ; Nakano, Takashi ; Yamakawa, Yuzo ; Tominaga, Junji
Author_Institution :
Center for Applied Near-Field Optics Res., Nat. Inst. of Adv. Industr. Sci. & Technol., Tsukuba
Abstract :
Using nano-explosion of platinum oxide thin film, 50-nm pit pattern was optically fabricated optically at linear speed of 3.0 m/s. We achieved the patterning speed of 15 million pits/s and actually fabricated the huge numbers of the pit
Keywords :
high-speed optical techniques; nanopatterning; optical fabrication; optical films; platinum compounds; 3.0 m/s; 50 nm; PtOx; high-speed optical nanofabrication; optical fabrication; patterning speed; pit pattern; platinum oxide nano-explosion-all dry-fabrication; Biomedical optical imaging; Etching; Gas lasers; High speed optical techniques; Lithography; Memory; Nanofabrication; Photonic crystals; Platinum; Silicon compounds;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540120
