• DocumentCode
    2518905
  • Title

    High-speed optical nanofabrication by platinum oxide nano-explosion - all dry-fabrication

  • Author

    Kurihara, Kazuma ; Nakano, Takashi ; Yamakawa, Yuzo ; Tominaga, Junji

  • Author_Institution
    Center for Applied Near-Field Optics Res., Nat. Inst. of Adv. Industr. Sci. & Technol., Tsukuba
  • fYear
    2005
  • fDate
    1-4 Aug. 2005
  • Firstpage
    145
  • Lastpage
    146
  • Abstract
    Using nano-explosion of platinum oxide thin film, 50-nm pit pattern was optically fabricated optically at linear speed of 3.0 m/s. We achieved the patterning speed of 15 million pits/s and actually fabricated the huge numbers of the pit
  • Keywords
    high-speed optical techniques; nanopatterning; optical fabrication; optical films; platinum compounds; 3.0 m/s; 50 nm; PtOx; high-speed optical nanofabrication; optical fabrication; patterning speed; pit pattern; platinum oxide nano-explosion-all dry-fabrication; Biomedical optical imaging; Etching; Gas lasers; High speed optical techniques; Lithography; Memory; Nanofabrication; Photonic crystals; Platinum; Silicon compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
  • Conference_Location
    Oulu
  • Print_ISBN
    0-7803-9278-7
  • Type

    conf

  • DOI
    10.1109/OMEMS.2005.1540120
  • Filename
    1540120
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2518905