Title :
Dynamic processes at shaping of films by method of deposition
Author :
Orlikov, N.L. ; Orlikov, L.N. ; Tarasova, K.S.
Author_Institution :
Tomsk State Univ. of Control Syst. & Radioelectronics, Russia
Abstract :
The opportunity for the prediction of the structure of a film is considered at rapprochement of an evaporator and substrate on the basis of the assaying gas-dynamic functions of the change of vapor parameters in the thermo-vacuum evaporation of materials.
Keywords :
thin films; vacuum deposited coatings; vacuum deposition; evaporator; film deposition; gas-dynamic functions; substrate; thermo-vacuum evaporation; vapor parameters; Acoustic devices; Control systems; Equations; Gears; Magnetic materials; Radio control; Reproducibility of results; Substrates; Temperature; Titanium;
Conference_Titel :
Electronic Instrument Engineering Proceedings, 2002. APEIE 2002. 2002 6th International Conference on Actual Problems of
Print_ISBN :
0-7803-7361-8
DOI :
10.1109/APEIE.2002.1075784
