Title :
Vision-based teleoperation of a stroboscopic microscopic interferownetric system for remote dynamic MEMS testing
Author :
Garmire, D. ; Muller, R.S. ; Demmel, J.
Author_Institution :
Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA
Abstract :
We demonstrate a system that automatically locates MEMS structures under a microscope equipped with a 3 DOF stage. It correlates images directly with the chip-mask layout and is especially useful for teleoperated experiments
Keywords :
integrated circuit layout; light interferometry; masks; micro-optics; micromechanical devices; optical microscopy; stroboscopes; telerobotics; chip-mask layout; remote dynamic MEMS testing; stroboscopic microscopic interferometric system; vision-based teleoperation; Laser beams; Micromechanical devices; Microscopy; Mirrors; Motion measurement; Optical computing; Optical interferometry; System testing; Turing machines; Ultraviolet sources;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540129
