Title :
Micromechanical actuators for spectroscopic measurements
Author :
Antila, Jarkko ; Kattclus, H. ; Saari, Heikki
Author_Institution :
VTT Inf. Technol., Espoo
Abstract :
In this paper, advantages of surface micromachined silicon devices as parallel-moving planar actuators are described. These devices are especially intended for interferometric applications, such as Fourier transform spectroscopy (FTS). FTS has become a widely-used, high-precision method for analytical chemistry greatly because of its wide range of operation from UV to sub-millimeter wavelengths
Keywords :
Fourier transform spectroscopy; light interferometry; micro-optics; microactuators; silicon; Fourier transform spectroscopic measurement; Si; interferometric applications; micromechanical actuators; parallel-moving planar actuators; surface micromachined silicon devices; Actuators; Fourier transforms; Micromechanical devices; Mirrors; Motion measurement; Sensor phenomena and characterization; Spectroscopy; Temperature sensors; Testing; Wafer bonding;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540132
