Title :
Infrared detection of carbon monoxide with a micromechanically tunable silicon fabry-perot filter
Author :
Sagberg, H. ; Ferber, Alain ; Haugholt, K.H. ; Johansen, Ib-Rune
Author_Institution :
Oslo Univ.
Abstract :
Robust sensing of carbon monoxide is possible with a tunable correlation filter. We demonstrate a silicon Fabry-Perot filter with high optical throughput, where an adjustable hidden airgap allows for the necessary tuning
Keywords :
carbon compounds; gas sensors; infrared detectors; micro-optics; microsensors; optical filters; optical sensors; optical tuning; silicon; CO; Si; carbon monoxide; correlation filter; infrared detection; micromechanically tunable silicon Fabry-Perot filter; Absorption; Band pass filters; Biosensors; Fabry-Perot; Gas detectors; Infrared detectors; Optical filters; Optical sensors; Silicon; Wavelength measurement;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540133
