Title :
Atomic force microscopy with optical heterodyne detection method
Author :
Kim, Min-Su ; Manzardo, O. ; Dandliker, R. ; Herzig, H.P. ; Aeschimann, L. ; Staufer, Urs ; Vettiger, P. ; Lee, Joun-Ho
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ.
Abstract :
We report on an atomic force microscope (AFM) based on a simple optical set-up using heterodyne detection. The deflection of the cantilever in the AFM was interferometrically measured using a Michelson interferometer. At a scanning speed of 2 mum/s and an integration time of 10 ms, the measured vertical resolution was 0.4 nm. The lateral resolution was 20 nm and is determined by the scanning speed and the integration time
Keywords :
Michelson interferometers; atomic force microscopy; heterodyne detection; measurement by laser beam; 10 ms; 2 micron/s; Michelson interferometer; atomic force microscopy; cantilever deflection; laser interferometry; optical heterodyne detection method; Atom optics; Atomic force microscopy; Instruments; Laser beams; Optical detectors; Optical interferometry; Optical microscopy; Optical mixing; Optical polarization; Testing;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540134
