• DocumentCode
    2519173
  • Title

    Spectrometer based on MOEMS shutter array

  • Author

    Pizzi, Marco ; Konyashkin, Valerian ; Busso, Piero ; Zelezny, Vladimir ; Vanek, Premysl ; Bursik, Josef ; Hokr, Milan ; Moilanen, Ville ; Marbach, Ralf

  • Author_Institution
    Centro Ricerche Fiat, Orbassano
  • fYear
    2005
  • fDate
    1-4 Aug. 2005
  • Firstpage
    179
  • Lastpage
    180
  • Abstract
    In this work a MOEMS shutter array was developed to be a wavelength selective component inside the spectrometer. This paper presents the implemented spectrometer prototype based on the MOEMS shutter array
  • Keywords
    infrared spectrometers; micro-optics; micromechanical devices; optical arrays; optical elements; MOEMS shutter array; infrared spectrometer; Chemistry; Filters; Gratings; Mirrors; Optical sensors; Prototypes; Sensor arrays; Spectroscopy; Stress; Wavelength measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
  • Conference_Location
    Oulu
  • Print_ISBN
    0-7803-9278-7
  • Type

    conf

  • DOI
    10.1109/OMEMS.2005.1540137
  • Filename
    1540137
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2519173