DocumentCode
2519265
Title
Spherical aberration correction using a silicon nitride deformable membrane mirror
Author
Himmer, Phillip A. ; Dickensheets, David L.
Author_Institution
Electr. & Comput. Eng. Dept., Montana State Univ., Bozeman, MT
fYear
2005
fDate
1-4 Aug. 2005
Firstpage
185
Lastpage
186
Abstract
A gold-coated silicon nitride membrane mirror 1.25 mm in diameter corrects up to 3 waves of spherical aberration at 633 nm. A 2times improvement in edge response is observed in an N.A. 0.55 optical system
Keywords
aberrations; adaptive optics; gold; micromirrors; silicon compounds; 1.25 mm; 633 nm; Au; SiN; deformable membrane MEMS mirror; gold-coated silicon nitride mirror; spherical aberration correction; Biomembranes; Focusing; Glass; Image storage; Lenses; Mechanical variables control; Micromechanical devices; Microscopy; Mirrors; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location
Oulu
Print_ISBN
0-7803-9278-7
Type
conf
DOI
10.1109/OMEMS.2005.1540141
Filename
1540141
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