Title :
Spherical aberration correction using a silicon nitride deformable membrane mirror
Author :
Himmer, Phillip A. ; Dickensheets, David L.
Author_Institution :
Electr. & Comput. Eng. Dept., Montana State Univ., Bozeman, MT
Abstract :
A gold-coated silicon nitride membrane mirror 1.25 mm in diameter corrects up to 3 waves of spherical aberration at 633 nm. A 2times improvement in edge response is observed in an N.A. 0.55 optical system
Keywords :
aberrations; adaptive optics; gold; micromirrors; silicon compounds; 1.25 mm; 633 nm; Au; SiN; deformable membrane MEMS mirror; gold-coated silicon nitride mirror; spherical aberration correction; Biomembranes; Focusing; Glass; Image storage; Lenses; Mechanical variables control; Micromechanical devices; Microscopy; Mirrors; Silicon;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540141
