DocumentCode :
2519298
Title :
Silicon-based tunable liquid lens system
Author :
Krogmann, Florian ; Moench, Wolfgang ; Zappe, Hans
Author_Institution :
Lab. for Micro-optics, Freiburg Univ.
fYear :
2005
fDate :
1-4 Aug. 2005
Firstpage :
189
Lastpage :
190
Abstract :
We present a novel silicon-based micro-lens system actuated by electro-wetting including a lens centering mechanism and taking advantage of silicon dioxide dielectric layers and low surface roughness of standard MEMS-processes
Keywords :
dielectric materials; microlenses; micromechanical devices; silicon compounds; surface roughness; wetting; MEMS-process; SiO2; electro-wetting; novel silicon-based microlens system; silicon dioxide dielectric layer; silicon-based tunable liquid lens system; surface roughness; Contacts; Dielectric liquids; Fabrication; Hysteresis; Laser tuning; Lenses; Micromechanical devices; Silicon; Tunable circuits and devices; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
Type :
conf
DOI :
10.1109/OMEMS.2005.1540143
Filename :
1540143
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2519298
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