Estimation of sample and probe tilts in scanning probe microscopy

Sample and probe orientations are important parameters in scanning probe microscopic (SPM) imaging. The authors develop techniques for estimating the values of these parameters using image processing techniques. These techniques form an essential calibration step in SPM imaging. It is shown that SPM images can be corrected for distortions induced due to the orientation parameters. Results are presented with images of semiconductor samples. It is demonstrated that improved surface recovery is possible by combining information from several SPM images taken at appropriate sample and probe orientations