Title :
Vernier MOEMS alignment mechanisms
Author :
Syms, R.R.A. ; Zou, H. ; Stagg, J.
Author_Institution :
Dept. of Electr. & Electron. Eng., Imperial Coll., London
Abstract :
Positional precision in MOEMS alignment is increased beyond the value set by pattern transfer using a Vernier mechanism based on multiple rack-and-tooth latches. Two- and four-section latches are demonstrated, and limits in precision magnification identified
Keywords :
micro-optics; microactuators; MOEMS alignment; microactuator; multiple rack-and-tooth latches; pattern transfer; precision magnification; vernier mechanism; Bonding; Capacitive sensors; Educational institutions; Electrothermal effects; Microactuators; Micromechanical devices; Optical devices; Portals; Springs; Teeth;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Conference_Location :
Oulu
Print_ISBN :
0-7803-9278-7
DOI :
10.1109/OMEMS.2005.1540147
