Title :
Reliability overview of RF MEMS devices and circuits
Author :
Melle, S. ; Flourens, F. ; Dubuc, D. ; Grenier, K. ; Pons, P. ; Pressecq, F. ; Kuchenbecker, J. ; Muraro, J.L. ; Bary, L. ; Plana, R.
Author_Institution :
Lab. d´´Autom. et d´´Anal. des Syst., CNRS, Toulouse, France
Abstract :
This paper outlines the reliability properties of RF MEMS devices and circuits. The tools used to evaluate the reliability properties are presented. Results am shown on both moveable and non moveable devices. Key parameters that drive the reliability are pointed out: stress, roughness, temperature dependance, dielectric properties Finally, it is presented some solutions to improve the reliability performance of these devices in term of technology and design.
Keywords :
contact resistance; internal stresses; life testing; micromechanical devices; microswitches; microwave circuits; microwave filters; microwave switches; millimetre wave devices; semiconductor device reliability; surface roughness; IC process compatibility; MEMS technology; RF MEMS circuits; RF MEMS devices; contact resistance; dielectric properties; dynamic behavior; life test; low insertion loss filter; microswitch; moveable devices; nonmoveable devices; reliability performance; roughness; stress; temperature dependance; Circuits; Filters; Insertion loss; Micromechanical devices; Packaging; Radiofrequency microelectromechanical systems; Space technology; Stress; Switches; Topology;
Conference_Titel :
Microwave Conference, 2003. 33rd European
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMC.2003.1262212
