DocumentCode
2519569
Title
Piezoelectric acoustic resonant mass sensors
Author
Zhao, Hongyuan ; Pang, Wei ; Zhang, Hao
Author_Institution
Coll. of Precision Instrum. & Opto-Electron. Eng., Tianjin Univ., Tianjin, China
fYear
2010
fDate
3-6 Dec. 2010
Firstpage
1
Lastpage
4
Abstract
Piezoelectric acoustic resonant sensors enable selective and label-free detection of biological events in real time. They are featured with self-actuating and self-detecting ability, and have been extensively explored in chemical and biological sensing applications. In this paper, four types of piezoelectric acoustic sensors operating at different resonant modes (i.e., thickness extensional mode, thickness shear mode, lateral extensional mode and flexural mode) are reviewed and discussed, with particular focus on the fundamental mechanisms and the recent biological sensing applications.
Keywords
bioMEMS; bioacoustics; piezoelectric devices; biological sensing applications; chemical sensing applications; label-free detection; piezoelectric acoustic resonant mass sensors; resonant mode; self-actuating ability; self-detecting ability; Biosensors; DNA; Film bulk acoustic resonators; Proteins; Resonant frequency; MEMS; bio-sensing; mass sensor; piezoelectric;
fLanguage
English
Publisher
ieee
Conference_Titel
Advances in Optoelectronics and Micro/Nano-Optics (AOM), 2010 OSA-IEEE-COS
Conference_Location
Guangzhou
Print_ISBN
978-1-4244-8393-8
Electronic_ISBN
978-1-4244-8392-1
Type
conf
DOI
10.1109/AOM.2010.5713583
Filename
5713583
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