• DocumentCode
    2519569
  • Title

    Piezoelectric acoustic resonant mass sensors

  • Author

    Zhao, Hongyuan ; Pang, Wei ; Zhang, Hao

  • Author_Institution
    Coll. of Precision Instrum. & Opto-Electron. Eng., Tianjin Univ., Tianjin, China
  • fYear
    2010
  • fDate
    3-6 Dec. 2010
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Piezoelectric acoustic resonant sensors enable selective and label-free detection of biological events in real time. They are featured with self-actuating and self-detecting ability, and have been extensively explored in chemical and biological sensing applications. In this paper, four types of piezoelectric acoustic sensors operating at different resonant modes (i.e., thickness extensional mode, thickness shear mode, lateral extensional mode and flexural mode) are reviewed and discussed, with particular focus on the fundamental mechanisms and the recent biological sensing applications.
  • Keywords
    bioMEMS; bioacoustics; piezoelectric devices; biological sensing applications; chemical sensing applications; label-free detection; piezoelectric acoustic resonant mass sensors; resonant mode; self-actuating ability; self-detecting ability; Biosensors; DNA; Film bulk acoustic resonators; Proteins; Resonant frequency; MEMS; bio-sensing; mass sensor; piezoelectric;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advances in Optoelectronics and Micro/Nano-Optics (AOM), 2010 OSA-IEEE-COS
  • Conference_Location
    Guangzhou
  • Print_ISBN
    978-1-4244-8393-8
  • Electronic_ISBN
    978-1-4244-8392-1
  • Type

    conf

  • DOI
    10.1109/AOM.2010.5713583
  • Filename
    5713583