Title :
Multijunction thermal converters by commerical CMOS fabrication
Author :
Gaitan, Michael ; Suehle, John ; Kinard, Joseph R. ; Huang, D.X.
Author_Institution :
Nat. Inst. of Stds. & Tech., Gaithersburg, MD, USA
Abstract :
New multijunction thermal converters (MJTCs) fabricated in a commerical CMOS foundry are described. The MJTC is a cantilever structure with a suspended, resistance heating element and thermocouple hot junctions located near the heater on the cantilever. The pit etched below is 150 × 150 μm in size. The heater structure is composed of a polysilicon resistor and the thermocouples are made of aluminum-polysilicon. The results of measurements of their AC-DC transfer characteristics are given
Keywords :
CMOS integrated circuits; electric current measurement; elemental semiconductors; integrated circuit manufacture; silicon; thermocouples; 150 micron; AC measurement; Al-Si; DC measurement; cantilever; cantilever structure; commerical CMOS fabrication; heater structure; multijunction thermal converters; polysilicon resistor; resistance heating element; thermocouple hot junctions; Analog-digital conversion; CMOS process; Electrons; Etching; Fabrication; Foundries; Microstructure; NIST; Resistance heating; Voltage;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 1993. IMTC/93. Conference Record., IEEE
Conference_Location :
Irvine, CA
Print_ISBN :
0-7803-1229-5
DOI :
10.1109/IMTC.1993.382642
