Multijunction thermal converters by commerical CMOS fabrication

Author

Gaitan, Michael ; Suehle, John ; Kinard, Joseph R. ; Huang, D.X.

Author_Institution

Nat. Inst. of Stds. & Tech., Gaithersburg, MD, USA

fYear

1993

fDate

18-20 May 1993

Firstpage

243

Lastpage

244

Abstract

New multijunction thermal converters (MJTCs) fabricated in a commerical CMOS foundry are described. The MJTC is a cantilever structure with a suspended, resistance heating element and thermocouple hot junctions located near the heater on the cantilever. The pit etched below is 150 × 150 μm in size. The heater structure is composed of a polysilicon resistor and the thermocouples are made of aluminum-polysilicon. The results of measurements of their AC-DC transfer characteristics are given

Keywords

CMOS integrated circuits; electric current measurement; elemental semiconductors; integrated circuit manufacture; silicon; thermocouples; 150 micron; AC measurement; Al-Si; DC measurement; cantilever; cantilever structure; commerical CMOS fabrication; heater structure; multijunction thermal converters; polysilicon resistor; resistance heating element; thermocouple hot junctions; Analog-digital conversion; CMOS process; Electrons; Etching; Fabrication; Foundries; Microstructure; NIST; Resistance heating; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 1993. IMTC/93. Conference Record., IEEE

Conference_Location

Irvine, CA

Print_ISBN

0-7803-1229-5

Type

conf

DOI

10.1109/IMTC.1993.382642

Filename

382642