Title :
A micro flow sensor for volumetric measurement of conductive fluids
Author :
Yu, Haixia ; Li, Dachao ; Xu, Kexin ; Roberts, Robert C. ; Tien, Norman C.
Author_Institution :
State Key Lab. of Precision Meas. Technol. & Instrum., Tianjin Univ., Tianjin, China
Abstract :
We present a microfluidic volumetric measurement system for applications involving conductive fluids. The low cost polydimethylsiloxane (PDMS) device consists of an interconnected Venturi Tube to generate vacuum for fluid manipulation, and a resistance based sensor for fluid volume quantification. The Venturi Tube achieves less than 88 kPa (absolute pressure) vacuum when a 256 kPa external pressure is applied. Measurements using the volumetric sensor have been demonstrated with deionized water, and the results correlate well (R2=0.9996) with the micro syringe references. The demonstrated system provides excellent functionality for conductive fluids, such as those used in biomedical applications.
Keywords :
bioMEMS; flow sensors; microfluidics; microsensors; polymers; Venturi Tube; conductive fluids; deionized water; external pressure; fluid manipulation; fluid volume quantification; low cost polydimethylsiloxane device; microflow sensor; microfluidic volumetric measurement system; microsyringe; resistance based sensor; volumetric sensor; Biomedical measurements; Conductivity measurement; Electrodes; Electron tubes; Fluid flow measurement; Fluids; Volume measurement; Venturi Tube; conductive fluid; flow sensor; volumetric measurement;
Conference_Titel :
Advances in Optoelectronics and Micro/Nano-Optics (AOM), 2010 OSA-IEEE-COS
Conference_Location :
Guangzhou
Print_ISBN :
978-1-4244-8393-8
Electronic_ISBN :
978-1-4244-8392-1
DOI :
10.1109/AOM.2010.5713586
