• DocumentCode
    2519950
  • Title

    Chip In Wafer for Integrated System

  • Author

    Souriau, Jean-Charles ; Faivre, Marie-Emmanuelle ; Sillon, Nicolas

  • Author_Institution
    CEA-LETI Minatec, Grenoble, France
  • fYear
    2008
  • fDate
    9-12 Dec. 2008
  • Firstpage
    999
  • Lastpage
    1004
  • Abstract
    System integration is clearly a driving force for innovation in packaging. The need for miniaturization has led to new system in package (SiP) architectures, which combine a whole range of different technologies. However, cost is the critical issue in SiP packaging as individual operations are currently necessary to complete each individual package. Taking into account all the developments that have been made to date on wafer level packaging, it has been proposed to establish SiP at wafer level. The process presented in this paper proposes to use silicon wafer as frame. Known Good Dies are fitted into through cavities and sealed with polymer. This process enables coplanar chip active face with the host silicon wafer. Due to the consistency given by the silicon frame, the wafer can be treated in wafer line for the above IC process such as passive integration, via plating and pad redistribution, bumping, testing and dicing. The paper describes technologies developed for chip integration in silicon wafer (CIW) and first results on wafer characterization will be set out.
  • Keywords
    chip scale packaging; elemental semiconductors; integrated circuit testing; silicon; system-in-package; wafer level packaging; IC testing; Known Good Dies; Si; SiP packaging; bumping; chip integration; coplanar chip active face; dicing; integrated system; pad redistribution; passive integration; plating; polymer seal; silicon wafer; system in package; wafer level packaging; wafer line; Costs; Curing; Integrated circuit testing; Optical sensors; Packaging; Paper technology; Polymers; Silicon; Vehicles; Wafer scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics Packaging Technology Conference, 2008. EPTC 2008. 10th
  • Conference_Location
    Singapore
  • Print_ISBN
    978-1-4244-2117-6
  • Electronic_ISBN
    978-1-4244-2118-3
  • Type

    conf

  • DOI
    10.1109/EPTC.2008.4763560
  • Filename
    4763560