Title :
Physical Model Extracting of Spiral Inductor on Glass Substrate
Author :
Wu, Sung-Mao ; Tai, Yu-Che ; Lai, Chi-Chang ; Lin, Wang-Yu ; Guan, Shang-Wei
Author_Institution :
Dept. of Electr. Eng., Nat. Univ. of Kaohsiung, Kaohsiung, Taiwan
Abstract :
In order to decrease substrate loss and perform high quality factor of spiral inductors, high resistivity glass substrate is used to characterize and model spiral inductor for SiP application in this study. We use 6 ¿m thick copper film for spiral structure and the dielectric material is polyimide. We establish physical models by using frequency-independent lump elements that one is the conventional ¿ -model, the other is the ¿ -model added the skin-effect. The quality factor is about 25~40 and the inductance is 1~10 nH.
Keywords :
Q-factor; copper; dielectric materials; inductance; inductors; metallic thin films; polymers; skin effect; copper film; dielectric material; frequency-independent lump elements; high resistivity glass substrate; inductance; physical models; polyimide; quality factor; size 6 mum; skin-effect; spiral inductors; ¿ -model; Conductivity; Copper; Dielectric materials; Dielectric substrates; Frequency; Glass; Inductors; Polyimides; Q factor; Spirals;
Conference_Titel :
Electronics Packaging Technology Conference, 2008. EPTC 2008. 10th
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-2117-6
Electronic_ISBN :
978-1-4244-2118-3
DOI :
10.1109/EPTC.2008.4763565
