• DocumentCode
    2520045
  • Title

    Physical Model Extracting of Spiral Inductor on Glass Substrate

  • Author

    Wu, Sung-Mao ; Tai, Yu-Che ; Lai, Chi-Chang ; Lin, Wang-Yu ; Guan, Shang-Wei

  • Author_Institution
    Dept. of Electr. Eng., Nat. Univ. of Kaohsiung, Kaohsiung, Taiwan
  • fYear
    2008
  • fDate
    9-12 Dec. 2008
  • Firstpage
    1028
  • Lastpage
    1033
  • Abstract
    In order to decrease substrate loss and perform high quality factor of spiral inductors, high resistivity glass substrate is used to characterize and model spiral inductor for SiP application in this study. We use 6 ¿m thick copper film for spiral structure and the dielectric material is polyimide. We establish physical models by using frequency-independent lump elements that one is the conventional ¿ -model, the other is the ¿ -model added the skin-effect. The quality factor is about 25~40 and the inductance is 1~10 nH.
  • Keywords
    Q-factor; copper; dielectric materials; inductance; inductors; metallic thin films; polymers; skin effect; copper film; dielectric material; frequency-independent lump elements; high resistivity glass substrate; inductance; physical models; polyimide; quality factor; size 6 mum; skin-effect; spiral inductors; ¿ -model; Conductivity; Copper; Dielectric materials; Dielectric substrates; Frequency; Glass; Inductors; Polyimides; Q factor; Spirals;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics Packaging Technology Conference, 2008. EPTC 2008. 10th
  • Conference_Location
    Singapore
  • Print_ISBN
    978-1-4244-2117-6
  • Electronic_ISBN
    978-1-4244-2118-3
  • Type

    conf

  • DOI
    10.1109/EPTC.2008.4763565
  • Filename
    4763565
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2520045