Title :
High temperature stable super high electromechanical coupling SAW substrates and application for SAW devices
Author :
Yamanouchi, Kazuhiko ; ISHII, Toru
Author_Institution :
Tohoku Inst. of Technol., Sendai, Japan
Abstract :
In this study, in order to improve the temperature coefficient of frequency (TCF), the propagation characteristics of SiO2/rotated Y-cut, X-propagating LiNbO3 leaky surface acoustic wave (SAW) substrates with a large electromechanical coupling coefficient (k2), zero attenuation and zero TCF are theoretically investigated. The results showed a large k2 of more than 0.2 (zero k2 of Rayleigh mode), zero TCF and zero propagation attenuation for leaky SAW in the case of a short boundary at a thin film thickness of H/λ=0.15∼0.22 (H=SiO2 film thickness, λ=SAW wavelength). The experimental results agreed with the theoretical ones.
Keywords :
Rayleigh waves; acoustic wave propagation; electromechanical effects; lithium compounds; silicon compounds; substrates; surface acoustic wave filters; surface acoustic wave resonators; surface acoustic waves; thermal stability; IDT type SAW resonators; Rayleigh mode; SAW device applications; SAW wavelength; SiO2-LiNbO3; SiO2/rotated Y-cut X-propagating LiNbO3 leaky SAW substrates; TCF; electromechanical coupling coefficient; high temperature stable super high electromechanical coupling SAW substrates; leaky SAW; propagation characteristics; short boundary; surface acoustic wave substrates; temperature coefficient of frequency; thin film thickness; wide band SAW filter; zero TCF; zero propagation attenuation; Acoustic propagation; Acoustic waves; Attenuation; Frequency control; Laplace equations; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature; Transistors;
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2002. IEEE International
Print_ISBN :
0-7803-7082-1
DOI :
10.1109/FREQ.2002.1075858
