Study of novel Love mode surface acoustic wave filters

Author

Kalantar-zadeh, Kourosh ; Wlodarski, Wojtek ; Galatsis, Osmas ; Holland, Anthony

Author_Institution

Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, Vic., Australia

fYear

2002

fDate

2002

Firstpage

74

Lastpage

77

Abstract

Novel Love mode filters based on ZnO and SiO₂/90° rotated ST-cut quartz crystal structure were fabricated. A comprehensive study was carried out to show the capabilities of such filters. The periodicity of the fingers is 50 μm and the thickness of the SiO₂ and ZnO layers ranges from 0.2 to 7.2 μm. Electromechanical coupling coefficient, capacitance per unit wavelengths of finger pairs and temperature coefficient of frequency are studied in terms of thickness of the wave-guiding layers.

Keywords

Love waves; capacitance; electromechanical effects; interdigital transducers; silicon compounds; surface acoustic wave filters; surface acoustic wave waveguides; zinc compounds; 0.2 to 7.2 micron; 50 micron; IDT; Love mode surface acoustic wave filters; SiO₂; SiO₂ layer thickness; SiO₂/rotated ST-cut quartz crystal structure; ZnO layer thickness; ZnO-SiO₂; ZnO/rotated ST-cut quartz crystal structure; electromechanical coupling coefficient; finger pairs; finger periodicity; temperature coefficient of frequency; waveguiding layer thickness; Acoustic propagation; Acoustic waves; Capacitance; Dielectric constant; Filters; Fingers; Substrates; Surface acoustic waves; Temperature; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and PDA Exhibition, 2002. IEEE International

Print_ISBN

0-7803-7082-1

Type

conf

DOI

10.1109/FREQ.2002.1075860

Filename

1075860