Title :
Good resonance operating stabilities of piezoelectric SAW device structures using special perturbed multi-variable thermo-electromechanical finite element
Author :
Zhang, W. ; Shi, L.Y. ; Wu, Z.H.
Author_Institution :
Dept. of Civil Eng., Zhejiang Univ., Hangzhou, China
Abstract :
Several highly nonlinear relations between disturbed surface acoustic wave (DSAW) and piezoelectric surface mount stress (PSMS) properties, temperature changes and electrode heights are computationally discovered, and quantitatively determined using a special new and effective perturbed multivariable thermal piezoelectric generalized plane strain finite element method (GPS FEM) with well-based shift and element static-condensation by improving plate element accuracies, in order to establish operating stabilities and design various potential high quality SAW resonating devices. Through executing the new codes on PC and Unix platforms, some new exclusive and fundamental results are included and provided.
Keywords :
electrodes; electronic engineering computing; finite element analysis; perturbation techniques; piezoelectricity; stability; surface acoustic wave resonators; DSAW properties; GPS FEM; PC platforms; PSMS properties; SAW resonating devices; Unix platforms; disturbed surface acoustic wave properties; electrode heights; element static-condensation; nonlinear relations; operating stability; perturbation; perturbed multivariable thermal piezoelectric generalized plane strain FEM; piezoelectric SAW device structures; piezoelectric surface mount stress properties; plate element accuracy; resonance operating stability; special perturbed multi-variable thermo-electromechanical finite element method; temperature changes; Acoustic waves; Capacitive sensors; Electrodes; Finite element methods; Piezoelectric devices; Resonance; Surface acoustic wave devices; Temperature; Thermal stability; Thermal stresses;
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2002. IEEE International
Print_ISBN :
0-7803-7082-1
DOI :
10.1109/FREQ.2002.1075861