• DocumentCode
    2520277
  • Title

    Frequency temperature characteristics of stepped bi-mesa-shaped AT-cut quartz resonators

  • Author

    Goka, S. ; Sekimoto, H. ; Watanabe, Y. ; Sato, T.

  • Author_Institution
    Graduate Sch. of Eng., Tokyo Metropolitan Univ., Japan
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    91
  • Lastpage
    95
  • Abstract
    To confirm the decoupling effect of stepped bi-mesa structures, we fabricated stepped bi-mesa resonators and measured their frequency-temperature behavior. The results showed that stepped bi-mesa resonators have better temperature characteristics than bi-mesa resonators. These results confirmed that using stepped bi-mesa structures reduces the influence of mesa edges and improves the characteristics of bi-mesa resonators.
  • Keywords
    coupled mode analysis; crystal resonators; electron device testing; quartz; thermal analysis; SiO2; bi-mesa resonators; decoupling effect; energy trapping effect; frequency temperature characteristics; mesa edges; mode coupling; stepped bi-mesa resonators; stepped bi-mesa structures; stepped bi-mesa-shaped AT-cut quartz resonators; temperature characteristics; Electrodes; Energy measurement; Fabrication; Frequency measurement; Hafnium; Sputtering; Temperature; Thickness measurement; Transistors; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium and PDA Exhibition, 2002. IEEE International
  • Print_ISBN
    0-7803-7082-1
  • Type

    conf

  • DOI
    10.1109/FREQ.2002.1075863
  • Filename
    1075863
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2520277