Composite structure of piezoelectric quartz resonator

In this paper, we present the experimental results and behavior of the composite structure of piezoelectric quartz resonators. The aim of the study is precise determination of the properties of a thin ferroelectric PbTiO₃ layer using a dynamical method of measurement. The composite resonator is based on the X90°-cut quartz plano-parallel 10 MHz resonator (the diameter of 14.0 mm and thickness of 0.35 mm) with a buffer layer of TiO₂, which was realized by magnetron sputtering technology. The thin layer of PbTiO₃ was realized by sol-gel technology. The system of Pt electrodes is used for excitation of the composed resonator and for determination of influence of the thin layer. This influence is generated by the mass loading effect, and by the piezoelectric contribution of the thin PbTiO₃ layer. The behavior of the composed structure is studied using the quartz resonator X90°±5´ orientation, and also using the non-piezoelectric plate orientation Z90°±5´. Many technological problems are discussed in our contribution.