Estimation of frequency-temperature characteristics of AT-cut quartz resonators with large mass-loading

Author

Gong, Xun ; Sekimoto, Hitoshi ; Goka, Shigeyoshi ; Watanabe, Yasuaki

Author_Institution

Graduate Sch. of Eng., Tokyo Metropolitan Univ., Japan

fYear

2002

fDate

2002

Firstpage

170

Lastpage

173

Abstract

This paper evaluates the effect of electrodes on the frequency-temperature (f-T) characteristics of a very thin plate. The calculated results show that the f-T behavior of the fundamental resonance greatly depends on the mass-loading effect R through the thermal coefficient of R and the mass-loading effect is sensitive to the thermal expansion coefficient α_E of the electrodes. Consequently, both the mass-loading effect and α_E can have a great influence upon the f-T behavior. It is also shown that the electrode size hardly affects the f-T behavior.

Keywords

crystal resonators; elasticity; electrodes; finite element analysis; quartz; thermal expansion; AT-cut quartz resonators; Au; Au electrode elasticity effect; SiO₂; electrode effects; electrode size; f-T behavior; finite element method; frequency-temperature characteristics estimation; fundamental resonance; fundamental thickness-shear mode; mass-loading effect; mass-loading thermal coefficient; thermal expansion coefficient; trapped-energy resonances; Chemical processes; Elasticity; Electrodes; Finite element methods; Frequency estimation; Gold; Resonance; Strips; Temperature; Thermal expansion;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and PDA Exhibition, 2002. IEEE International

Print_ISBN

0-7803-7082-1

Type

conf

DOI

10.1109/FREQ.2002.1075874

Filename

1075874