Finite element analysis of activity-dips in BAW resonators and sensors

This paper describes the continuous evolution of the modeling of activity-dips in BAW resonant structures from analytical analysis towards a systematic use of numerical methods, of which the most widely used is finite element analysis. The main justification of this tendency comes from the difficulty which the end-user may encounter to be acquainted with any kind of spurious mode that may occasionally couple with the so-called metrological mode under temperature variations. Already achieved results, ongoing investigations, and still required improvements are discussed.