Title :
Love mode SAW sensors with ZnO layer operating in gas and liquid media
Author :
Kalantar-Zadeh, Kourosh ; Wlodarski, Wojtek ; Trinchi, Adrian ; Holland, Anthony ; Galatsis, Kosmas
Author_Institution :
Sch. of Electr. & Comput. Eng., R. Melbourne Inst. of Technol., Vic., Australia
Abstract :
Novel layered surface acoustic wave (SAW) sensors, based on a ZnO/90° rotated ST-cut quartz crystal structure, were fabricated. They were employed for liquid and gas sensing applications. Their mass detection limit in liquid media is as low as 100 pg/cm2. Furthermore, these sensors are able to sense oxygen gas concentrations as low as 0.2 ppm in nitrogen gas.
Keywords :
Love waves; crystal resonators; gas sensors; piezoelectric transducers; surface acoustic wave sensors; zinc compounds; Love mode SAW sensors; N2; O2; SiO2; ZnO; gas media; gas sensing applications; layered surface acoustic wave sensors; liquid media; liquid sensing applications; mass detection limit; rotated ST-cut quartz crystal structure; Acoustic propagation; Acoustic sensors; Acoustic waves; Frequency; Gas detectors; Sensor phenomena and characterization; Substrates; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2002. IEEE International
Print_ISBN :
0-7803-7082-1
DOI :
10.1109/FREQ.2002.1075887
