DocumentCode
2520812
Title
Experimental investigation of the BAW device potentials of singly rotated Y-cut ordered Langasite-structure crystals
Author
Jen, Shen ; Teng, Bill C C ; Chou, Mitch M.C. ; Chai, Bruce H T ; Lee, T.T. ; Gwo, Jamn
Author_Institution
Crystal Photonics Inc., Sanford, FL, USA
fYear
2002
fDate
2002
Firstpage
307
Lastpage
310
Abstract
This paper discusses the results from two rounds of experimental mapping (with gross and refined incremental cut angle) for BAW device potentials of singly rotated Y-cut plates of the ordered Langasite-structure compounds CNGS, CTGS, SNGS, and STGS. Identical groups of singly rotated Y-cut plano-plano test resonators were fabricated with cut angles ranging from -60° to +60° at 15° and 3° increments. Room temperature equivalent circuit parameters and normalized frequency versus temperature were measured and compared. The data collected are examined in term of three primary factors for BAW device potentials, namely, the electromechanical coupling strength, the acoustic loss (or the Q·f product), and the existence of temperature compensated orientation. The results are also compared with a group of AT-cut quartz references of the same design. As anticipated, based on the order-disorder physical arguments, strong electro-mechanical coupling strength (more than 4 times that of AT) and low acoustic loss (in one CNGS case the highest Q·f product reaches 3.8 times that of AT, higher even than the best reported for Langatate) were observed.
Keywords
acoustic resonators; bulk acoustic wave devices; equivalent circuits; losses; BAW device; CNGS; CTGS; Ca3NbGa3Si2O14; Ca3TaGa3Si2O14; SNGS; STGS; Sr3NbGa3Si2O14; Sr3TaGa3Si2O14; acoustic loss; cut angles; electro-mechanical coupling strength; electromechanical coupling strength; equivalent circuit parameters; order-disorder physical arguments; singly rotated Y-cut ordered Langasite-structure crystals; singly rotated Y-cut plano-plano test resonators; temperature compensated orientation; Acoustic devices; Acoustic testing; Bulk acoustic wave devices; Circuit testing; Coupling circuits; Equivalent circuits; Frequency measurement; Photonic crystals; Raw materials; Temperature measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium and PDA Exhibition, 2002. IEEE International
Print_ISBN
0-7803-7082-1
Type
conf
DOI
10.1109/FREQ.2002.1075898
Filename
1075898
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