Thermo-mechanical and Piezoelectric Modeling of PZT Actuated μ-mirror Device

Author

Matin, A. ; Akai, D. ; Hanebuchi, M. ; Kawano, T. ; Sawada, K. ; Ishida, M.

Author_Institution

Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Toyohashi, Japan

fYear

2008

fDate

9-12 Dec. 2008

Firstpage

1288

Lastpage

1294

Abstract

We have investigated numerically the optimization of newly designed Pb(Zr,Ti)O₃ (PZT) actuated segmented μ-mirror device used particularly in bio-medical application for adaptive optics. By performing advanced finite element modeling that includes thermo-mechanical and piezoelectric simulations an optimal μ-mirror device design is suggested maintaining its structural integrity intact.

Keywords

adaptive optics; bioMEMS; biomedical equipment; finite element analysis; lead compounds; microactuators; micromirrors; optimisation; piezoelectric actuators; piezoelectric materials; piezoelectricity; PZT; PZT actuated μ-mirror device; adaptive optics; biomedical application; finite element modeling; optimization; piezoelectric modeling; segmented micromirror device; thermomechanical modeling; Adaptive optics; Biomedical optical imaging; Capacitive sensors; Mirrors; Optical fiber networks; Optical microscopy; Optical surface waves; Samarium; Tensile stress; Thermomechanical processes;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Packaging Technology Conference, 2008. EPTC 2008. 10th

Conference_Location

Singapore

Print_ISBN

978-1-4244-2117-6

Electronic_ISBN

978-1-4244-2118-3

Type

conf

DOI

10.1109/EPTC.2008.4763608

Filename

4763608