DocumentCode :
2521156
Title :
Electrical characteristics of single-sided, grooved-type quartz resonators in a shock-tolerant, two-step shape
Author :
Nagaura, Yoshiaki ; Nagaura, Kumiko ; NAGAURA, Zenichiro ; KINOSHITA, Kazuhiro ; NAGATO, Kazutaka ; EMOTO, Kyohei ; Imani, Kazutake ; MURATA, Motomu ; YOKOMIZ, Seiichi ; NAKAZAWA, Mitsuo
Author_Institution :
Nagaura Lab., Fukuoka, Japan
fYear :
2002
fDate :
2002
Firstpage :
415
Lastpage :
419
Abstract :
Manufacturing results of high frequency AT-cut quartz resonators with a very unique structure for high frequency applications and a shock-tolerance of up to 20,000 G are described.
Keywords :
crystal resonators; electron device manufacture; electron device testing; quartz; SiO2; electrical characteristics; high frequency AT-cut quartz resonators; quartz resonator manufacturing; quartz resonator structure; shock-tolerance; shock-tolerant two-step shape; single-sided grooved-type quartz resonators; Acceleration; Anisotropic magnetoresistance; Apertures; Chemical processes; Electric variables; Electrodes; Etching; Manufacturing processes; Resonant frequency; Shape;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2002. IEEE International
Print_ISBN :
0-7803-7082-1
Type :
conf
DOI :
10.1109/FREQ.2002.1075918
Filename :
1075918
Link To Document :
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